Rudolph AutoEl IV-NIR3 Film Thickness Ellipsometer
User
2800.00 GPB £

Rudolph AutoEl IV-NIR3 Film Thickness Ellipsometer

All London, London, United Kingdom Published date: November 6, 2018

Description

Rudolph AutoEl IV-NIR3 Film Thickness Ellipsometer. This unit is Multi-Wavelength Ellipsometer with direct readout of thickness and refractive index of single and multi-layer films. The NIR-3 optics allows user to select 405nm, 633nm and 830nm. The longer wavelength option is ideal for plasma deposited films so they are rendered transparent. Option 4E Microspot optics are used to reduce spot size. Been tested and fully functional.
Options Installed:
NIR-3 Optics
Automatic Scanning Sample Stage
SS91 (Which inclues Master/Slave Processor and Stage)
4E 4mm Microspot Optics - 0.30 mm Beam Diameter, 0.030 mm x 0.090 mm Spot Size
Version Control Code Information:
Version Control Code: 621CB.33.17
Hardware Version: 621CB
Software Version: 33.17
Light Source/Wavelength Type: IV-NIR3 - Tungsten Halogen Incandescent - Wavelengths: 633, 830, 405 nm
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      Rudolph AutoEl IV-NIR3 Film Thickness Ellipsometer

      2800.00 GPB £
      All London, London, United Kingdom

      KEC

      Published date: November 6, 2018

      Views: 21

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